Scientist / Senior Scientist (Lithography Process
3 days ago
Lithography is generally critical gating module, with most number of repeated processes across various semiconductor technology and product development needs. IME’s lithography needs are extremely diversified - from sub-micron features, high-aspect-ratio with high topography for MEMS to 10’s of nm with immersion for photonics & mmwave devices, and ultra-thick resists/polymers upon different types of wafers for heterogeneous integrations.
IME is looking for an experienced Lithography Process and Equipment Engineer to support lithography process development and process maintenance across 3 programs, namely MEMS, Wideband Gap, and Heterogeneous Integration at three different sites (Science Park-2, Ang Mo Kio, and Fusionopolis).
- Develop and maintain litho process on Si, Glass and SiC wafers (6” to 12” diameters).
- Design and qualify inline process control test structures relevant to these 3 technology platforms.
- Review tape-out form and conduct process release for new tape-outs including creation of job files creation & litho margin study.
- Review tool/process SPC (recipe/frequency) and highlight issues and solution in Fab/Process Module meetings.
- Participate in Design-Of-Experiments (DOE) & data analysis for solving integration problems as member of quality improvement teams.
- Review post PM qualification / escalation reports to make decision on equipment release.
- Document and maintain all process developments and baselines/BKMs for Process Review-Board meetings and records.
Job Requirements
- PhD in Science or Engineering discipline
- 5 to 8 years of industry / R&D organization experience in lithography
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