Senior Scientist

3 days ago


Singapore A*STAR RESEARCH ENTITIES Full time

The Micro Electro Multiphysical Systems (MEMS) team is looking for a MEMS fabrication process integrator. The researcher will work with a multidisciplinary team to develop processes for the fabrication of MEMS-based acoustic/ultrasonic transducers, RF devices, and other sensor and actuator devices based on piezo materials such as PZT and ScAlN films. Job Responsibilities Work with design and process module teams to develop differentiated and robust MEMS integration platforms based on PZT, ScAlN films, and other piezo materials. Design integration process flows for upcoming piezoelectric MEMS devices, design and execute DOEs to realize the devices. Conduct integration and fabrication of thin-film piezoelectric ultrasonic transducers, acoustic devices, and RF devices. Manage wafer lot progress in the cleanroom, conduct inspection and characterization of MEMS devices/structures and failure analysis, using metrology tools such as DRSEM, CDSEM, ellipsometers, and microscopes. Collaborate and communicate effectively with internal teams and external partners to provide timely project updates and ensure smooth project execution. Job Requirements PhD in Electrical Engineering/Chemical Engineering/Mechanical Engineering/Applied Physics or equivalent. At least 5 years’ experience in semiconductor process modules, integration, or MEMS-related modules and integration. Strong knowledge and hands‐on experience in microfabrication processes (e.g., etch, lithography, CMP, PVD, and PECVD), with prior experience in process optimization or recipe tuning preferred. Good knowledge and hands‐on experience on microfabrication inspection and characterization methods, and data analysis of wafer-level measurements. Good communication and presentation skills, ability to work independently, as well as being an excellent team player. Continuously seeks opportunities to expand knowledge and skills, staying up to date with emerging trends and advancements in the field. Capable of conceptualizing and implementing creative approaches to address research questions and technology development. #J-18808-Ljbffr



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